MEMS原理及應用MEMS原理及應用1什么是MEMS？MEMS是英文MicroElectroMechanicalsystems的縮寫，即微電子機械系統。微電子機械系統(MEMS)技術是建立在微米/納米技術（micro/nanotechnology）基礎上的21世紀前沿技術，是指對微米/納米材料進行設計、加工、制造、測量和控制的技術。它可將機械構件、光學系統、驅動部件、電控系統集成為一個整體單元的微型系統。這種微電子機械系統不僅能夠采集、處理與發送信息或指令，還能夠按照所獲取的信息自主地或根據外部的指令采取行動。它用微電子技術和微加工技術(包括硅體微加工、硅表面微加工、LIGA和晶片鍵合等技術)相結合的制造工藝，制造出各種性能優異、價格低廉、微型化的傳感器、執行器、驅動器和微系統。微電子機械系統（MEMS）是近年來發展起來的一種新型多學科交叉的技術，該技術將對未來人類生活產生革命性的影響。它涉及機械、電子、化學、物理、光學、生物、材料等多學科。什么是MEMS？MEMS是英文MicroElectro2MEMSdescriptionMEMStechnologycanbeimplementedusinganumberofdifferentmaterialsandmanufacturingtechniques;thechoiceofwhichwilldependonthedevicebeingcreatedandthemarketsectorinwhichithastooperate.MEMSdescriptionMEMStechnolo3MaterialsforMEMSManufacturingSiliconPolymers[?p?lim?]

MetalsMaterialsforMEMSManufacturi4MEMSBasicProcessesThischartisnotcomplete:MEMSBasicProcessesThischar5ApplicationsInoneviewpointMEMSapplicationiscategorizedbytypeofuse.SensorActuatorStructureApplicationsInoneviewpoint6

Inanotherviewpointmemsapplicationsarecategorizedbythefieldofapplication(Commercialapplicationsinclude):Ink

jetprinters,whichusepiezoelectrics[pai?i:z?ui?lektriks]orthermalbubbleejectiontodepositinkonpaper.Accelerometersinmoderncarsforalargenumberofpurposesincludingairbagdeploymentincollisions[k?'li??n].Accelerometersinconsumerelectronicsdevicessuchasgamecontrollers(NintendoWii),personalmediaplayers/cellphones(AppleiPhone,variousNokiamobilephonemodels,variousHTCPDAmodels)andanumberofDigitalCameras(variousCanonDigitalIXUSmodels).AlsousedinPCstoparktheharddiskheadwhenfree-fallisdetected,topreventdamageanddataloss.

Inanotherviewpointmemsap7

MEMSgyroscopes[?d?ai?r?u]usedinmoderncarsandotherapplicationstodetectyaw[j?:];e.g.todeployarolloverbarortriggerdynamic[dai?n?mik]stabilitycontrol.Siliconpressuresensorse.g.cartirepressuresensors,anddisposablebloodpressuresensors.Displayse.g.theDMDchipinaprojectorbasedonDLPtechnologyhasonitssurfaceseveralhundredthousandmicromirrors.Opticalswitchingtechnologywhichisusedforswitchingtechnologyandalignment[?'lainm?nt]fordatacommunications.

MEMSgyroscopes[?d?ai?r?u]u8

Bio-MEMSapplicationsinmedicalandhealthrelatedtechnologiesfromLab-On-ChiptoMicroTotalAnalysis(biosensor,chemosensor).Interferometric[?int?fi??r?mit?]modulatordisplay(IMOD)applicationsinconsumerelectronics(primarilydisplaysformobiledevices).Usedtocreateinterferometricmodulation-reflectivedisplaytechnologyasfoundinmirasoldisplays.

Bio-MEMSapplicationsinmedi9

CompanieswithstrongMEMSprogramscomeinmanysizes.Thelargerfirmsspecializeinmanufacturinghighvolumeinexpensivecomponentsorpackagedsolutionsforendmarketssuchasautomobiles,biomedical,andelectronics.Thesuccessfulsmallfirmsprovidevalueininnovativesolutionsandabsorbtheexpenseofcustomfabricationwithhighsalesmargins.Inaddition,bothlargeandsmallcompaniesworkinR&DtoexploreMEMStechnology.

CompanieswithstrongMEM10Researchanddevelopment

ResearchersinMEMSusevariousengineeringsoftwaretoolstotakeadesignfromconcepttosimulation,prototypingandtesting.FiniteelementanalysisisoftenusedinMEMSdesign.Simulationofdynamics[dai'n?mik],heat,andelectricaldomains,amongothers,canbeperformedbyANSYS,COMSOLandCoventorWare-ANALYZER.Othersoftware,suchasCoventorWare-ARCHITECTandMEMS-PRO,isusedtoproduceadesignlayoutsuitablefordeliverytoafabricationfirmandevensimulatetheMEMSembeddedinasystem.Onceprototypesareon-hand,researcherscantestthespecimens['spesim?n]usingvariousinstruments,includinglaser['leiz?]doppler['d?pl?(r)]scanningvibrometers[vai'br?mit?],microscopes,andstroboscopes['str?ub?sk?up]Researchanddevelopment

R11

THANKU

THANKU12

Depositionprocesses

OneofthebasicbuildingblocksinMEMSprocessingistheabilitytodepositthinfilmsofmaterialwithathicknessanywherebetweenafewnanometrestoabout100micrometres

Depositionprocesses13

PatterninginMEMSisthetransferofapatternintoamaterial.

14

Etchingprocesses

Therearetwobasiccategoriesofetchingprocesses:wetanddryetching.Intheformer,thematerialisdissolvedwhenimmersedinachemicalsolution.Inthelatter,thematerialissputteredordissolvedusingreactiveionsoravaporphaseetchant.SeeWilliamsandMullerorKovacs,MalufandPetersonforasomewhatdatedoverviewofMEMSetchingtechnologies

Etchingprocesses15

Siliconisthematerialusedtocreatemostintegratedcircuitsusedinconsumerelectronicsinthemodernworld.Theeconomiesofscale,readyavailabilityofcheaphigh-qualitymaterialsandabilitytoincorporateelectronicfunctionalitymakesiliconattractiveforawidevarietyofMEMSapplications.Siliconalsohassignificantadvantagesengendered

[in?d?end?]throughitsmaterialproperties.Insinglecrystalform,siliconisanalmostperfectHookeanmaterial,meaningthatwhenitisflexedthereisvirtuallynohysteresis[?hist??ri:sis]andhencealmostnoenergydissipation[?disi?pei??n].Aswellasmakingforhighlyrepeatablemotion,thisalsomakessiliconveryreliableasitsuffersverylittlefatigue[f??ti:ɡ]andcanhaveservicelifetimesintherangeofbillionstotrillionsofcycleswithoutbreaking.ThebasictechniquesforproducingallsiliconbasedMEMSdevicesaredepositionofmateriallayers,patterningoftheselayersbyphotolithography[.f?ut?li'θ?gr?fi]andthenetching[?et?i?]toproducetherequiredshapes.

Siliconisthematerialused16

Eventhoughtheelectronicsindustryprovidesaneconomyofscaleforthesiliconindustry,crystalline[?krist?lain]

siliconisstillacomplexandrelativelyexpensivematerialtoproduce.Polymers[?p?lim?]ontheotherhandcanbeproducedinhugevolumes,withagreatvarietyofmaterialcharacteristics.MEMSdevicescanbemadefrompolymersbyprocessessuchasinjectionmolding,embossingorstereolithographyandareespeciallywellsuitedtomicrofluidicapplicationssuchasdisposablebloodtestingcartridges['kɑ:trid?].

Eventhoughtheelectroni17

MetalscanalsobeusedtocreateMEMSelements.Whilemetalsdonothavesomeoftheadvantagesdisplayedbysiliconintermsofmechanicalproperties,whenusedwithintheirlimitations,metalscanexhibit[iɡ?zibit]veryhighdegreesofreliability.Metalscanbedepositedbyelectroplating,evaporation[iɡ?zibit],andsputtering[?sp?t?]processes.Commonlyusedmetalsincludegold,nickel[?nikl],aluminium[??lju:?minj?m],chromium['kr?umi?m],titanium[tai?teinj?m,ti-],tungsten[?t??st?n],platinum[?pl?tin?m],andsilver.

Metalscanalsobeusedtocr18MEMS原理及應用MEMS原理及應用19什么是MEMS？MEMS是英文MicroElectroMechanicalsystems的縮寫，即微電子機械系統。微電子機械系統(MEMS)技術是建立在微米/納米技術（micro/nanotechnology）基礎上的21世紀前沿技術，是指對微米/納米材料進行設計、加工、制造、測量和控制的技術。它可將機械構件、光學系統、驅動部件、電控系統集成為一個整體單元的微型系統。這種微電子機械系統不僅能夠采集、處理與發送信息或指令，還能夠按照所獲取的信息自主地或根據外部的指令采取行動。它用微電子技術和微加工技術(包括硅體微加工、硅表面微加工、LIGA和晶片鍵合等技術)相結合的制造工藝，制造出各種性能優異、價格低廉、微型化的傳感器、執行器、驅動器和微系統。微電子機械系統（MEMS）是近年來發展起來的一種新型多學科交叉的技術，該技術將對未來人類生活產生革命性的影響。它涉及機械、電子、化學、物理、光學、生物、材料等多學科。什么是MEMS？MEMS是英文MicroElectro20MEMSdescriptionMEMStechnologycanbeimplementedusinganumberofdifferentmaterialsandmanufacturingtechniques;thechoiceofwhichwilldependonthedevicebeingcreatedandthemarketsectorinwhichithastooperate.MEMSdescriptionMEMStechnolo21MaterialsforMEMSManufacturingSiliconPolymers[?p?lim?]

MetalsMaterialsforMEMSManufacturi22MEMSBasicProcessesThischartisnotcomplete:MEMSBasicProcessesThischar23ApplicationsInoneviewpointMEMSapplicationiscategorizedbytypeofuse.SensorActuatorStructureApplicationsInoneviewpoint24

Inanotherviewpointmemsapplicationsarecategorizedbythefieldofapplication(Commercialapplicationsinclude):Ink

jetprinters,whichusepiezoelectrics[pai?i:z?ui?lektriks]orthermalbubbleejectiontodepositinkonpaper.Accelerometersinmoderncarsforalargenumberofpurposesincludingairbagdeploymentincollisions[k?'li??n].Accelerometersinconsumerelectronicsdevicessuchasgamecontrollers(NintendoWii),personalmediaplayers/cellphones(AppleiPhone,variousNokiamobilephonemodels,variousHTCPDAmodels)andanumberofDigitalCameras(variousCanonDigitalIXUSmodels).AlsousedinPCstoparktheharddiskheadwhenfree-fallisdetected,topreventdamageanddataloss.

Inanotherviewpointmemsap25

MEMSgyroscopes[?d?ai?r?u]usedinmoderncarsandotherapplicationstodetectyaw[j?:];e.g.todeployarolloverbarortriggerdynamic[dai?n?mik]stabilitycontrol.Siliconpressuresensorse.g.cartirepressuresensors,anddisposablebloodpressuresensors.Displayse.g.theDMDchipinaprojectorbasedonDLPtechnologyhasonitssurfaceseveralhundredthousandmicromirrors.Opticalswitchingtechnologywhichisusedforswitchingtechnologyandalignment[?'lainm?nt]fordatacommunications.

MEMSgyroscopes[?d?ai?r?u]u26

Bio-MEMSapplicationsinmedicalandhealthrelatedtechnologiesfromLab-On-ChiptoMicroTotalAnalysis(biosensor,chemosensor).Interferometric[?int?fi??r?mit?]modulatordisplay(IMOD)applicationsinconsumerelectronics(primarilydisplaysformobiledevices).Usedtocreateinterferometricmodulation-reflectivedisplaytechnologyasfoundinmirasoldisplays.

Bio-MEMSapplicationsinmedi27

CompanieswithstrongMEMSprogramscomeinmanysizes.Thelargerfirmsspecializeinmanufacturinghighvolumeinexpensivecomponentsorpackagedsolutionsforendmarketssuchasautomobiles,biomedical,andelectronics.Thesuccessfulsmallfirmsprovidevalueininnovativesolutionsandabsorbtheexpenseofcustomfabricationwithhighsalesmargins.Inaddition,bothlargeandsmallcompaniesworkinR&DtoexploreMEMStechnology.

CompanieswithstrongMEM28Researchanddevelopment

ResearchersinMEMSusevariousengineeringsoftwaretoolstotakeadesignfromconcepttosimulation,prototypingandtesting.FiniteelementanalysisisoftenusedinMEMSdesign.Simulationofdynamics[dai'n?mik],heat,andelectricaldomains,amongothers,canbeperformedbyANSYS,COMSOLandCoventorWare-ANALYZER.Othersoftware,suchasCoventorWare-ARCHITECTandMEMS-PRO,isusedtoproduceadesignlayoutsuitablefordeliverytoafabricationfirmandevensimulatetheMEMSembeddedinasystem.Onceprototypesareon-hand,researcherscantestthespecimens['spesim?n]usingvariousinstruments,includinglaser['leiz?]doppler['d?pl?(r)]scanningvibrometers[vai'br?mit?],microscopes,andstroboscopes['str?ub?sk?up]Researchanddevelopment

R29

THANKU

THANKU30

Depositionprocesses

OneofthebasicbuildingblocksinMEMSprocessingistheabilitytodepositthinfilmsofmaterialwithathicknessanywherebetweenafewnanometrestoabout100micrometres

Depositionprocesses31

PatterninginMEMSisthetransferofapatternintoamaterial.

32

Etchingprocesses

Therearetwobasiccategoriesofetchingprocesses:wetanddryetching.Intheformer,thematerialisdissolvedwhenimmersedinachemicalsolution.Inthelatter,thematerialissputteredordissolvedusingreactiveionsoravaporphaseetchant.SeeWilliamsandMullerorKovacs,MalufandPetersonforasomewhatdatedoverviewofMEMSetchingtechnologies

Etchingprocesses33

Siliconisthematerialusedtocreatemostintegratedcircuitsusedinconsumerelectronicsinthemodernworld.Theeconomiesofscale,readyavailabilityofcheaphigh-qualitymaterialsandabilitytoincorporateelectronicfunctionalitymakesiliconattractiveforawidevarietyofMEMSapplications.Siliconalsohassignificantadvantagesengendered

[in?d?end?]throughitsmaterialproperties.Insinglecrystalform,siliconisanalmostperfectHookeanmaterial,meaningthatwhenitisflexedthereisvirtuallynohysteresis[?hist??ri:sis]andhencealmostnoenergydissipation[?disi?pei??n].Aswellasmakingforhighlyrepeatablemotion,thisalsomakessiliconveryreliableasitsuffersverylittlefatigue[f??ti:ɡ]andcanhaveservicelifetimesintherangeofbillionstotrillionsofcycleswithoutbreaking.Thebasictech