微專業---半導體制造技術課程：半導體工程專業英語ContentsSemiconductorProperties半導體特性01SemiconductorMaterials半導體材料02SemiconductorDeviceandHowTheyareUsed半導體器件及其使用03ProcessTechnology工藝技術04FabricationProcesses制造工藝05SemiconductorMaterialsandProcessCharacterization半導體材料與工藝表征06SemiconductorMaterials2.1CrystalStructureofSolids2.2ElementsofSemiconductorMaterialSystem2.3InorganicSemiconductors2.4MaterialsSelectionCriteria2.5OrganicSemiconductors2.6BulkSingle-CrystalFormation2.7Thin-FilmSingleCrystalFormation2.8Substrates2.9Thin-FilmInsulators2.10Thin-FilmConductors0221Introduction

Asitwaspointedoutearlier,thereisastrongcorrelationbetweenthepropertiesofsemiconductormaterial,andperformanceofdevicesdesignedto

performspecificfunctionswhicharefabricatedusingit.Whatitmeansis

thatsomesemiconductormaterialsbythevirtueoftheirinherentproperties

aresuitableforcarryingoutsomedevicefunctions,whilearenotsuitableto

carryoutsomeotherfunctions.2

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2.4MaterialsSelectionCriteria/?k??r??le??(?)n/相關的/virtue/優點

/?n?her?nt/固有的實現7

Table

considersdeviceperformanceimplicationsofthephysicalcharacteristicsofsemiconductormaterialsintroducedinthischapter.2

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2.4MaterialsSelectionCriteriaText/??mpl??ke??(?)nz/影響222

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23In-classexercisConnecttheEnglishwords/phrasesandChinesemeaningwithlines.crystaldielectricepitaxygrainboundariesinsulatorlatticeconstantsemiconductsubstratethin-filmareadefect絕緣體襯底半導體薄膜晶格常數區域缺陷外延晶體晶界電介質24In-classexercisFillintheblankswithproperwordsorphrases.1.defectsobservedinsemiconductorcrystalsfallintofourclasseswhichincludepointdefects,linedefects,

defects,andvolumedefects.

2.Silicon(Si)has

valenceelectrons.3.Carbonnanotubesare

materials.

2

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2

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25單詞/短語音標中文含義amorphousmaterial/??m??rf?sm??t?ri?l/非晶材料amorphoussilicon/??m??rf?s?s?l?k?n非晶硅antimonide/??nt?m??na?d/銻化物areadefect/?eri??di?fekt/區域缺陷arsenide/?ɑrs??na?d/砷化物ballistictransport/b??l?st?k?tr?nsp??rt/彈道輸運bandgapengineering/b?nd?ɡ?p?end???n?r??/帶隙工程bottom-upprocess/?bɑ?t?m?p?prɑ?ses/自下而上工藝bufferlayer/?b?f?rler/緩沖層KeyTerms26單詞/短語音標中文含義bulkwafer/b?lk

?we?f?r/體晶圓buriedoxide/?berid?ɑ?ksa?d/埋氧層carbon-basedcompound/?kɑ?rb?nbe?st?kɑ?mpa?nd/碳基化合物chemicaltransition/?kem?k(?)ltr?n?z??(?)n/化學轉變complexoxide/k?m?pleks?ɑ?ksa?d/復合氧化物criticalthicknesshc/?kr?t?kl?θ?kn?s/臨界厚度hccrystallattice/?kr?stl?l?t?s/晶格crystalseed/?kr?stlsi?d/籽晶crystal/?kr?stl/晶體cubicclassofcrystal/?kju?b?k/立方晶系晶體danglingbond/?d??ɡl??bɑ?nd/懸掛鍵合2

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27單詞/短語音標中文含義dedicatedthin-filminsulator/?ded?ke?t?dθ?nf?lm??ns?le?t?r/專用薄膜絕緣體denudedzone/d??nu?d?dzo?n/剝蝕區diamondcrystallattice/?da??m?nd?kr?stl?l?t?s/金剛石晶格dielectricconstantk/?da???lektr?k?kɑ?nst?nt/

介電常數kdielectricstrength/?da???lektr?kstre?θ/

介電強度dielectric/?da???lektr?k/

電介質electromigration/??lektro?ma??ɡre??(?)n/電遷移epitaxialdeposition/?ep??t?ksi?l?dep??z??n/外延沉積epitaxiallayer(epilayer)/?ep??t?ksi?l?le??r/外延層epitaxy/?ep??t?ksi/外延facecenteredcubic(f.c.c.)cell/fe?s?s?nt?rd?kju?b?k/面心立方晶胞2

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28單詞/短語音標中文含義ferroelectricproperties/?fero???lektr?k?prɑ?p?rtiz/鐵電特性ferroelectric/?fero???lektr?k/鐵電體ferroicmaterial/'fero?km??t?ri?l/鐵電材料functionaloxide/?f??k??n(?)l?ɑ?ksa?d/功能氧化物gettering/?ɡet?r??/吸雜gradedlayer/?ɡre?d?d?le??r/漸變層grainboundaries/ɡre?n?ba?ndriz/晶界heterobonding/?het?ro??bɑ?nd??/異質鍵合heteroepitaxy/?het?ro??ep??t?ksi/異質外延hexagonalcrystal/hek?s?ɡ?nl?kr?st(?)l

/六方晶體homobonding/?ho?mo??bɑ?nd??/同質鍵合2

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29單詞/短語音標中文含義homoepitaxy/?ho?mo??ep??t?ksi/同質外延inorganicsemiconductor/??n??r?ɡ?n?k?semik?nd?kt?r/無機半導體insulator/??ns?le?t?r/絕緣體inter-layerdielectric(ILD)/?n?t??rler?da???lektr?k/層間介質(ILD)latticeconstant/?l?t?s?kɑ?nst?nt/晶格常數latticematching/?l?t?s?m?t???/晶格匹配latticemismatch/?l?t?s?m?s?m?t?/晶格失配latticemismatchedepitaxy/?l?t?s?m?s?m?t?

?ep??t?ksi/晶格失配外延long-rangestackingorder/?st?k??/長程有序magneticsemiconductor/m?ɡ?net?k?semik?nd?kt?r/磁性半導體metalalloy/?metl??l??/金屬合金2

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30單詞/短語音標中文含義metalsilicides/?met(?)l

?s?l??sa?d/金屬硅化物mobileion/?mo?bil?a??n?/可移動離子MOS/CMOStransistor/tr?n?z?st?r/MOS/CMOS晶體管multi-purposethin-filminsulator/??ns?le?t?r/多用途薄膜絕緣體multicrystallinematerial/?m?lti?kr?st?la?n/多晶材料nanocrystallinequantumdot/?nɑno??kr?st?la?n?kwɑ?nt?mdɑ?t/納米晶量子點nanodot/?n?no?dɑ?t/納米點nanotube/?n?no?tu?b/納米管nanowire/?n?no??wa??r/納米線nativeoxide/?ne?t?v?ɑ?ksa?d

/天然氧化物near-surfaceregion/?ri?d??n/近表面區2

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31單詞/短語音標中文含義non-metallicconductor/nɑ?n-m??t?l?kk?n?d?kt?r/非金屬導體organicmaterial/??r?ɡ?n?k

m??t?ri?l/有機材料organicsemiconductor/??r?ɡ?n?k?semik?nd?kt?r/有機半導體oxide/?ɑ?ksa?d/氧化物perovskitestructure/p??rɑ?vska?t?str?kt??r/鈣鈦礦結構physicaldamage/?f?z?k(?)l?d?m?d?/物理損傷piezoelectric/pa??izo??lektr?k/壓電材料polycrystallinematerial/p?l??kr?st?la?n/多晶材料pseudomorphicfilm/?psju?d???m??f?k/贗晶膜quantumdot/?kwɑ?nt?mdɑ?t/量子點quantumwell/?kwɑ?nt?mwel/量子阱2

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32單詞/短語音標中文含義radiationhardness/?re?di?e??(?)n?hɑ?rdn?s/輻射強度relaxedlattice/r??l?kst?l?t?s/弛豫晶格seededsublimation/?si?d?d?s?bl??me??n/籽晶升華semiconductor/?semik?nd?kt?r/半導體semiconductorperiodictable/?p?ri?ɑ?d?k/半導體周期表Semiconductor-on-Insulator/??ns?le?t?r/絕緣體上半導體single-crystal/?s??ɡ(?)l-?kr?st(?)l/單晶smallmolecule(monomer)/?mɑ?l?kju?l/(/?mɑ?n?m?r/)小分子(單體)solid-stateepitaxy/?ep??t?ksi/固態外延spintronic/sp?n?trɑ?n?k/自旋電子strainenergy/stre?n?en?rd?i/應變能2

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33單詞/短語音標中文含義strainedlayerheteroepitaxy/?het?ro??ep??t?ksi/應變層異質外延structuraltransition/?str?kt??r?ltr?n?z??(?)n/結構轉型sub-surfaceregion/s?b-?s??rf?s?ri?d??n/亞表面區substrate/?s?bstre?t/襯底superlattice/sju?p??l?t?s