1、操作手冊目錄Preface.序言IllTempress docume ntatio n set.文件設置IllUser Definition. 用戶定義 IVNotes, Cautions and Warnings注意，小心，警告VContents descriptionVlRevision HistoryVl1. lntroduction1-11.1 General1-11.2 Operator area description1-22. Safety2-22.1 Emergency Off (EMO)2-22.2 Alarm Signals2-22.2.1 Buzzer / LED2-22

2、.2.2 Touchscreen2-22.2.3 Light tower2-32.2.4 TSC Alarm menu2-32.3 Light tower signal description (optional)2-32.4 Toxic Material2-52.5 Safety measures2-53. Operator lnstructions2.5-13.1 Load or Unload process wafers3.1-13.1.1 Load process wafers3.1-13.1.2 Unload wafers3.1-13.2 Selecting a new proces

3、s recipe3.2-13.2.1 Touchscreen3.2-13.2.2 TSC-23.2-33.3 Start/Continue a new process recipe3.3-13.3.1 Touchscreen3.3-13.3.2 TSC-23.3-23.4 Stop a running process recipe3.4-13.4.1 Touchscreen3.4-13.4.2 TSC-23.4-23.5 Abort a running process recipe3.5-13.5.1 Touchscreen3.5-13.5.2 TSC-23.5-23.6 Clear Alar

4、ms3.6-13.6.1 Required action3.6-13.6.2 Touchscreen3.6-13.6.3 TSC-23.6-2Preface 序言This set of manu als expla ins how to operate a Horiz on tal Diffusio n/LPCVD furn ace.這套手冊是操作水平擴散爐/ LPCVD的說明。Refer to the Touchscree n refere nee manu al (M440.01) or the TSC-2 refere nee manual(M450.03) for a full des

5、cripti on of all operat ing scree ns.觸摸屏參考手冊(M440.01)和TSC-2參考手冊是操作觸摸屏的說明。For in formatio n about process ing refer to the Process Manu al (M220.xxx.02).工藝手冊(M220.xxx.02)是工藝過程的信息。The Tempress Horiz on tal Diffusi on Furn aces are fully described in the refere nee manu als(M300 series).參考手冊(M300 serie

6、s)是描述Tempress水平擴散爐的。Tempress docume ntatio n set文件設置The complete Tempress docume ntatio n set in cludes全 咅 E的文件包括? Safety man ual 安全手冊? Operator manual 操作手冊? Referenee manuals 參考手冊1. Loadstation 裝載區2. Furn ace爐子3. Gas cabinet 氣柜4. Ma in Power cab in et 電源柜5. DPC6. DTC7. Touchscree n 觸摸屏8. TSC-2 (+ o

7、ptio nal SECS/GEM)? Ven dor docume ntati on 賣主文件Delivery ' s on reques按要求交付? Desired ven dor docume ntatio n? Sic and Quartz drawings Sic和石英器件的圖紙? RS422 protocol (DPC/DTC)User Definition 用戶定義It is strongly recommended that all users first read this manual before starting any procedure. To produc

8、e an accessible manual suiting on various responsibilities, Tempress defines the following users: 特別建議開始所有程序之前，先看這本手冊。為不同職責的人編寫一本易懂的操作 手冊，Tempress定義了以下用戶：Operator 操作人員The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a recipe, put

9、 the wafers on the boat, fill in Lot ID, Start the process, monitor the progress and unload wafers. 操作人員的操作過程是從裝載硅片到卸載硅片。但是操作人員需要選擇工藝 菜單 ， 裝載硅片，填寫產品批號，啟動工藝和監控運行過程及卸載硅片Process engineer 工藝工程師The process engineer is a qualified chemical engineer, who is responsible for the process recipes and their res

10、ults. The process engineer writes, tests and releases new process recipes.工藝工程師是有資格的化學工程師，他負責工藝菜單和結果，需要編寫、測試和投 放新的工藝菜單。Service or Maintenance engineer 維修工程師The maintenance engineer is a qualified electrician or mechanic, who is responsible for a proper functioning system in accordance to its designa

11、ted purpose. A Tempress qualified service engineer will perform the first installation.維修工程師是有資格的電工或技工， 他要負責設備按設定的目的正常運行。 Tempress 的維修工程師會完成初始的安裝。Notes, Cautions and Warnings 注意，小心，警告Notes, Cautions and Warnings appear throughout this manual, where extra attention is required to a particular (safety

12、) item. Three levels can be distinguished:特別注意的地方會有特別提醒，注意，小心，警告要貫穿整個手冊，并分為三個等級：NOTE 注意Notes alert to pay atte nti on to items or procedures of special importa nee.注意是提醒特別重要的項目或程序CAUTION 小心Cautions alert for a potentially hazardous situation that may result in minor or moderate in juries.Cauti ons c

13、an also alert for pote ntial equipme nt an d/or product damage.小心是提醒有潛在的危險境況，會導致小的或中度的工傷。提醒有設備或產品的潛在損害。WARNING 警告Warnings alert for con diti ons that may result in perma nen t an d/or lethal in juries.警告是提醒有永久或致命的傷害。Contents descripti on內容簡介This manual is divided into the followi ng secti ons and ap

14、pe ndices:手冊分為下面幾個咅 E分和附錄Section 1 Introduction 簡介Provides an overview of the Tempress Systems Inc. Horiz on tal furn ace.Tempress公司水平爐子的簡介Section 2 Safety 安全Describes the safety comp onents and fun cti on s. It describes all measures that are required to provide a safe way of worki ng.描述安全組分和作用。它描述

15、為提供一個安全工作的所有措施。Section 3 Operator Instructions 操作說明Describes all procedures that are required for the operator.描述為操作員需要的所有規程Revision History版本的歷史 This manual is revisi on 1 of the Operator Manual and is inten ded to expla in the required operator procedures. The fun cti on and scree ns it describes

16、are based on the follow ing software releases:說明操作程序的操作手冊是第一個版本，其中功能和屏幕的描述是基于以下軟件版本：? TSC 2 version 6.3 (17-02-2003)? DPC 2.I.03 (17-02-2003)? DTC 2.F.02 (17-02-2003)? Touchscreen 2.1.05 (17-02-2003)For minor software and hardware cha nges, adde ndum to this manual will be available. For major chang

17、es, a new revision will be available. For information or other questions please con tact Tempress Systems Inc.一些小的軟件和硬件的變化會加在附錄里。大的變化就會有一個新的版本。其他問 題請聯系廠家。1n troduct ion 簡介1.1 Ge neral 概要The horiz on tal furn aces of Tempress Systems Inc. are developed accord ing to theEuropean directives for Machi n

18、ery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC).The Tempress Diffusi on system is a modular horiz on tal furn ace desig ned to process(silic on) wafers as part of the manu facturi ng tech no logy of semic on ductor, optical, MEMS and solar devices.公司的水平爐子是依照 Mach in ery (98/37/EC), Low V

19、oltage (73/23/EC) and EMC (89/336/EEC)的歐洲標準發展的。該公司的擴散爐是為半導體、光學、 MEMS和太陽 能器件中的硅片處理工藝設計的有標準組件的水平爐子。Figure 1-1 shows an example of a sta ndard L-shape diffusi on system with 4 process tubes shown without the partition of a cleanroom wall. It is a right-handed system, defined according to the position o

20、f the furnace relative to an operator. Usually the system contains more tha n 1 tube. Based on the nu mber and size of tubes, the system is referred to as a 2, 3 or 4 stack.Figure 1-1 is an example of a 4-stack system, allowi ng up to 4 differe nt processes at any time. The tubes are numbered from 1

21、 to 4, with tube number 1 at the top and tube 4 at the bottom. All tubes operate fully in depe nden tly.圖1-1是一個標準的L型四管擴散爐，沒有超凈間的隔離墻。對于操作人員來說是右 手操作。一般系統不止一個爐管，基于爐管的數量，系統分為2、3或4管爐。圖1-1是個四管爐，容許4個不同的工藝同時進行。四個管的編號是1在頂部，4在底部，所 有的管是完全獨立的。Load StattonFurnaceGas CabinetMain Powrcab inetFigure 1-1 Schematic v

22、iew of a right-ha nded 4-stack Diffusi on System1.2 Operator area descripti on 操作區介紹The operator area is limited to the loadstati on only. Figure 1-2 shows the releva nt items.The Loadstati on part of a Tempress System should be placed in the clea nroom. The Furn ace and Gas cab inet can opti on all

23、y be placed in the greyroom.操作區只限于裝載區，如圖1-2所示。裝載區必須置于千級間，爐體和氣柜置于萬級Buzzer/LEDLight/Fan SwitchTouchscreenEMOII IIIIIIIIII二Figure 1-2 Loadstati onTo load wafers, several loader types can be implemented, including the (default) inline loader, the Amtech Atmosca n?, and the backm oun ted softla nder. To

24、preve nt particles on the wafers during the loading process, a constant horizontal laminar flow is created from the loadstati on into the clea nroom.裝載硅片有幾種裝載類型，如聯機式、Amtech Atmosca n?和backmou nted softla nder類型，在裝片過程中為防止微粒落入硅片，千級間的裝載區要開啟水平的氣流吹掃。The loadstation is powered by 220V and has an illuminat

25、ed On/Off switch for the fans and the lights.The remote con trol cab inet in the loadstati on contains TFT-Touchscree ns, one for each tube. These supply the user in terface for com muni cati on with the Digital System Con trollers(Digital Process Controller, Digital Temperature Controller and Digit

26、al MotionCon troller).裝載區要有220v的電源，以及風扇和燈的照明開關。裝載區的遠程控制箱包括每個 管的觸摸屏，它提供一個與數字控制系統交流的用戶界面。2.Safety 安全This sect ion contains a brief descripti on of the safety features of a Tempress Horiz ontalDiffusio n System for the operator.Operators must have a gen eral kno wledge of the tech no logy invo Ived in

27、diffusi on systems. They should understand safety practices outlined in this manual.The descripti ons contained in this user manual are gen eral in n ature or gen eric. The actual furnace may differ in minor detail from the furnace described in this manual, because of customer specific requireme nts

28、 or modificati ons. Please refer to the Tempress Safety manual for a complete descripti on of available safety features.這一部分是為操作者有關擴散系統的安全裝置作一簡要說明。操作者必須了解擴散 工藝的基本常識，才能理解本手冊安全裝置的要點。用戶手冊中描寫的是一般性， 實際上爐子和此有一些細微的差別，是因為客戶的特殊需要或更改。安全裝置的完 整描述請參考安全手冊。2.1 Emerge ncy Off (EMO) 緊急關閉Emerge ncy Off (EMO) butt ons

29、 are located around the system at accessible locati ons according to EN 60204-1, especially EN 418. Pressing an EMO button turns off all power to the system except to the fans on top of the furnace. This prevents fire hazard as a result of high heat concen trati on in the furn ace cab in et. Also th

30、ose parts that are conn ected to a UPS facility rema in operati on al.按照EN 60204-1,尤其是EN 418標準，緊急關閉按鈕在系統中易接近的位置。按下 緊急關閉按鈕將切斷除爐子頂部風扇的其他電源，會防止由于爐子高溫引起的火災。其他連有不間斷電源的部分會繼續運行。Press the EMO butt on whe n a pers on is in dan ger, whe n there is a fire, a water leak or any other eve nt that could be hazardo

31、us to life.當著火，漏水或其他危害到生命的突發事件，要按EMO按鈕2.2 Alarm Sig nals警報信號Alarms and alerts gen erated by tube con trols are prese nted in several ways:石英管引起的報警有下面幾種形式：? Buzzer / LED 蜂鳴器 / LED? Touch screen 觸摸屏? Light tower 燈塔? TSC-II2.2.1 Buzzer /LEDVisible and audible alarm sig nals are gen erated by the DPC, D

32、TC and the DMC. The visible signals will be presented with a LED, located below the buzzer position as shown in Figure1-2. Each tube process is represe nted by one LED and buzzer comb in ati on.DPC, DTC和DMC提供了可視聽報警信號，可視信號是由LED實現的，如圖1-2它位 于蜂鳴器下方。每一個石英管都有一組對應的LED和蜂鳴器。2.2.2 Touchscree nThe visible alar

33、m signals will be presented on the touchscreen bottom line. Alarms on theTouchscree n are always in comb in ati on with an audible sig nal.Touch ing the scree n deactivates the audible sig nal.A new Alarm or alert will not activate the audible signal again before current alarm has bee n solved.可視報警信

34、號是在觸摸屏的底線，觸摸屏上的報警信號是于可聽信號相結合的，點 擊觸摸屏可解除報警信號。當前的報警情況沒有解決之前，新的報警情況不會激活 可聽報警。2.2.3 Light towerFigure 2-1 Default light tower con figurati onAlarms gen erated by the DPC, DTC and DMC will be made visible by three colors. Each color of the light tower represe nts particular circumsta nces.DPC, DTC和DMC提供了

35、三種顏色的報警信號，每種顏色代表特別的情況。-Green represe nts safe, operati onal con ditio n綠色代表安全，運行環境-Yellow represe nts warnings and alerts 黃色代表警告或警報-Red represe nts alarms紅色代表報警See section 2.3 for a full description. 2.3節會詳細描述2.2.4 TSC Alarm menuTSC 報警菜單Activating the alarm menu gives an overview of all active and p

36、assed alarms during the process. In case of an active alarm the“ Alarm ” butt on start flash ing on and off.Alarm如果“Alarm報警按鈕開始閃爍，激活報警菜單會顯示工藝中過去和現 在的報警情況。2.3 Light tower sig nal description (optio nal)燈塔信號描述(可選)Two light towers, one on top of the loadstati on in the clea nroom and one on top of the

37、furn ace in the greyroom, are in stalled for fast an ticipatio n on the status of the (product ion) process. This sect ion describes the fun cti on of each light and its relati on to the tube status. 兩個燈塔，一個在千級間裝載區頂部，一個在萬級間爐子頂部，這樣安裝是為了快 速反映工藝狀況。本部分描述每個燈的功能及對應的管子狀況。Green 綠Yellow 黃Red紅A light tower is

38、 (default) comprised of 3 lights: from top to bottom RED, YELLOW andGREEN.燈塔是由紅，黃，綠三個顏色組成：The gree n and red light can in dicate 2 sig nals綠和紅燈顯示兩種信號：亮或不亮1) OFF2) ONThe yellow light ca n in dicate 2 sig nals:黃燈顯示兩種信號：不亮或閃爍1) OFF2) BLINKThe light tower is con trolled by a tower sig nal PLC that recei

39、ves its comma nds from the various con trollers, among others DPC/DTC/DMC, Excess temperature con troller, gas detect ion system alarm and the TSC Host con trol.燈塔是由PLC信號塔控制，信號塔接收來自不同控制系統的命令，如DPC/DTC/DMC， 超溫控制，氣體檢測系統和TSC主機控制。In case the EMO-switch is activated or a power failure occurs for more tha

40、n 4 sec on ds, the power supply to the fur nace will stop and also the light tower will be off.The tower sig nal PLC is programmed by Tempress Systems Inc. and is not adjustable by customers.如果緊急關閉啟動或電源停止供電4秒以上，爐子電源將切斷，燈塔也會關掉。信號塔PLC的程序是由Tempress公司編寫的，用戶不能改動。For a functional descripti on of the light

41、 tower sig nals see table 1:燈塔的功能描述如表1Sig nal信號Mode 模式Descriptio n 描述屏幕開運行沒有警告和信息關沒有運行黃燈 閃爍N2壓力開關沒有氮氣流動檢測空氣壓力開關沒有空氣流動檢測Torch 溫度(750)Torch溫度超過750oCTorch火焰中斷沒有火焰，H2閥門會關閉Torch H2/O2 比例H2/O2比超過安全值Torch夕卜殼Torch表面溫度太咼電源組溫度傳感器電源組溫度太高源瓶溫度源瓶溫度太高源瓶水平位置|源的液面太低O2-低氧氣流速太低排放（低/高）排放氣流超出限制限度警報（如果工藝菜單 中有程序）實際值超出限制等待

42、操作（如果工藝菜單 中有程序）需要持續操作工藝完成舟手動Servo成手動模式維護模式維護模式被激活關沒有警告或警報紅燈開超溫監測器激活|管子過熱泄漏檢測檢測到氣或水泄漏:關沒有警告或警報沒有危險Table 1 Light tower sig nal descripti on2.4 Toxic Material 有毒材料The process engin eer, resp on sible for all process related activities, has to inform the operator about the hazards of the process.工藝工程師要對

43、全部及相關工藝過程負責，必須告知操作員工藝中存在的危險。2.5 Safety measures 安全措施Safety measures are in dicated in the appropriate procedures安全措施會在適當的程序中指出。3.Operator In structio ns 操作說明This docume nt describes the various procedures required for an operator. The procedures describe how to load and uni oad wafers, how to select

44、 a new process recipe, how to start/continue a process recipe, how to stop the timer of a running process recipe, how to modify Variable Comma nds ' whe n available and how to abort a running process recipe.這一文件向操作者描述了不同的程序：如何裝卸硅片，如何選擇一個新的工藝菜單，如何開始或繼續工藝菜單，如何停止運行的工藝計時，如需要怎樣修改可變參數， 如何中斷一個正在運行的工藝。3

45、.1 Load or Un load process wafers 裝卸硅片Loadi ng and uni oadi ng process wafers on the paddle is required before and after each process run.每一個工藝過程運行之前和之后都要從槳上裝卸硅片。3.1.1 Load process wafers 裝載硅片? Place the wafers on the wafer carriers, depe nding on the situati on with (vacuum) tweezers or a wafer tra

46、n sfer syste m用真空吸筆或硅片轉移裝置把硅片裝入硅片承載 器。? Pick-up wafer carriers with a pick-up fork or automated loading tool.? Place the wafer carriers around the cen ter of flatz one as in dicated on the loadstatio n.用叉子或自動裝載工具提取硅片承載器放到裝載區的中心位置。3.1.2 Un load wafers 卸載硅片CAUTION 小心 Wafers and paddle are hot.硅片和槳是熱的。

47、? Allow the wafers to cool dow n. 讓硅片降溫? Pick-up wafer carriers with a pick-up fork or automated load ing tool. (Amtech SystemsS30C)? Remove the wafers from the wafer carriers, depe nding on the situati on with (vacuum) tweezers or a wafer transfer syste m用叉子或自動裝載工具提取硅片承載器。然后用 真空吸筆或硅片轉移裝置把硅片從硅片承載器中取

48、出。3.2 Selecting a new process recipe 選一個新的工藝菜單A new process recipe n eeds to be selected so the new in structi ons can be executed. A newprocess recipe can only be selected if the curre nt process recipe is in Step 0要執行新的指令需要選一個新的工藝菜單。只有當現在工藝菜單處在的Step才可以選擇新的工藝菜單。3.2.1 Touchscreen 觸摸屏1) return to the

49、 Main Menu by pressing ESC until the following screen appears:按ESC直到返回主菜單。2) press 4' to access Tub按 c4ni進入管子控制3) press 6' to ' Select a Process按ecip進入 選擇工藝菜單4) select the desired process recipe by en teri ng its nu mbe 通過鍵入數字選擇需要的工藝菜單5) press Yes' to confirm the question'Sure to

50、 SELECT PROCESS recipe (Yes/No)?按“ yes證實你的選擇Note: selecting another process recipe is only possible if the current process recipe is inStep 0.注意：只有當現在工藝菜單處在的'Step才可以選擇新的工藝菜單。3.2.2 TSC-21) select the desired tube from the pulldown menu or from the ' Overview ' screen.從下拉菜單或從Overview上選擇要操作

51、的管子。2) select ' Operations ' to access the operations screen.按'Operation®進入操作屏3) Select the desired process recipe from the pull-dow n menu從下拉菜單中選擇所需的工藝菜單4) Press ' Yes' to confirm the questi on Are you sure to select ano ther process recipe?按Ye證實自己的選擇。Note: selecting anothe

52、r process recipe is only possible if the current process recipe is inStep0.注意：只有當現在工藝菜單處在的 Step才可以選擇新的工藝菜單。3.3 Start/Co nti nue a new process recipe開始 / 繼續一個新的工藝菜單Two differe nt situati ons require the Start comma nd.The first situation is starting a newly selected process recipe so it starts runnin

53、g from Step0. The second situation is starting a process recipe that has been stopped or is waiting for an Operator 'in structi on.兩種情形需要開始命令，第一是從Step C開始一個最近用過的一個工藝菜單。第二是開始一個曾停止過或在等待操作命令的工藝菜單。3.3.1 Touchscreen 觸摸屏1) return to the Main Menu by pressing' ESC until the following screen appears

54、:按ESC直到返回主菜單。2) press' 4' to access' Tufcfe Co 進進入管子控制3) press' 2' to access' Start/Stop ProcSBs駅e進入開始 /停止工藝菜單4) press ' Start ' to start/continue the selected proce按Btari開始臺/繼續所選擇的功藝菜單。Overview ' screen.3.3.2 TSC-21) select the desired tube from the pulldown menu

55、 or from the從下拉菜單或從Overview上選擇要操作的管子。2) select ' Operations ' to access the operatio按 sbOeeration鍵進入操作屏。3) press ' Start ' to start the selected process recipe from' Step 0 '按Start從Step開'始所選的工藝菜單。4) press Continue ' to start aipcipesthat has been stopped or is waiting

56、 for an'Operator ' i nstruct按n.' Co nti nue開始一個曾停止過或在等待操作命令的工藝菜單。< Do you按/a'rYe證實選擇。5) press Yes' to confirm the questi on3.4 Stop a running process recipe 停止一個運行的工藝Stopping a running process recipe may be required to temporarily stop the process recipe.When activated, the St

57、op comma nd will stop Wteieme rgive n comma nds are mai ntai ned.有時需要臨時停掉工藝，當激活Sto命令，計時器將停止，而已執行的命令將繼續。3.4.1 Touchscree n1) return tothe Main Menu bypress ng ESC un til the followi ng scree n appears:2) press 4' to access Tube Con trol '3) press 2' to access Start/Stop Process Recipe'4) press Stop ' to stop the selected process recipe3.4.2 TSC-21) select the desired tube from the pull-down menu or fom the Overview ' screen.2) select Operations ' to access the operations screen.3) Press