微專業---半導體制造技術課程：半導體工程專業英語ContentsSemiconductorProperties半導體特性01SemiconductorMaterials半導體材料02SemiconductorDeviceandHowTheyareUsed半導體器件及其使用03ProcessTechnology工藝技術04FabricationProcesses制造工藝05SemiconductorMaterialsandProcessCharacterization半導體材料與工藝表征06SemiconductorMaterials2.1CrystalStructureofSolids2.2ElementsofSemiconductorMaterialSystem2.3InorganicSemiconductors2.4MaterialsSelectionCriteria2.5OrganicSemiconductors2.6BulkSingle-CrystalFormation2.7Thin-FilmSingleCrystalFormation2.8Substrates2.9Thin-FilmInsulators2.10Thin-FilmConductors0214Introduction

Inthischaptersemiconductorsareconsideredintermsof

theirchemicalcompositiondistinguishingbetweeninorganicsemiconductors

andorganicsemiconductors.Amongtheformer,elementalsemiconductors

andcompoundsemiconductorsareconsideredasthedistinctclasses.First,

weconsiderinorganicsemiconductorsunderstoodhereasthesolidswhich

donotcontaincarbon-hydrogen(C-H)bondsintheirstructure.Inorganic

semiconductorsrepresentadominantclassofsemiconductormaterialsupon

whichbroadlyunderstoodsemiconductortechnologywasdevelopedoverthe

years.2

SemiconductorMaterials

2.3InorganicSemiconductors/d??st??ɡw????/有區別的/??n??r?ɡ?n?k/無機/d??st??kt/不同的/?ha?dr?d??n/氫/?dɑ?m?n?nt/占主導的15

ElementsformthegroupIVoftheperiodictable

featurefour

valenceelectronsandincludecarbon(C),silicon(Si),germanium(Ge),and

tin(Sn).2

SemiconductorMaterials

2.3InorganicSemiconductors/??r?d??ne?t/來源2.3.1

ElementalsemiconductorsText/d???r?me?ni?m/鍺/?p?ri?ɑ?d?k/周期性的(a)PeriodicTableofElementsand(b)partofitreferredtoas“semiconductorperiodictable”fromwhichelementalandcompoundsemiconductormaterialsoriginate./t?n/錫162

SemiconductorMaterials

2.3InorganicSemiconductors2.3.1

Elementalsemiconductors【Silicon,Si】Siisthemostimportantandthemostwidelyusedsemiconductor

material.

Whatmakessilicon

sospecialisacombinationofabundance(afteroxygen,siliconisthesecondmostcommonelementintheEarth’scrust),lowcostofobtaininghighqualitycrystalsascomparedtootherkeysemiconductors,andoverallcharacteristicsmakingithighlycompatiblewiththeneedsofmasscommercialmanufactureofsemiconductordevices./??b?nd?ns/大量/kr?st/地殼172

SemiconductorMaterials

2.3InorganicSemiconductors2.3.1

Elementalsemiconductors【Germanium,Ge】

Beforesilicontookoverasaleadsemiconductormaterial,germaniumwassemiconductorofchoiceinearlydeviceapplications.Thekeydeficiencyofgermaniumascomparedtosiliconisthefactthatitsnativeoxide,germaniumdioxideGeO2,

isunstableanddecomposesunderthenormalconditionsincludingexposure

towater./?di?k?m?po?z?z/分解/d??f??nsi/缺點/d???r?me?ni?m/鍺

Innature,carbonmostcommonlyappearsintheformofgraphite.Inthethree-dimensionalsingle-crystalconfigurationcarboncrystallizesintheformofadiamond.【Carbon,C】/?ɡr?fa?t/石墨/?da??m?nd/金剛石18

TheIV-IVclassofsemiconductorcompounds

isrepresentedbysiliconcompoundswithcarbon(siliconcarbide,

SiC)andwithgermanium(silicongermanium,SiGe).2

SemiconductorMaterials

2.3InorganicSemiconductors2.3.2

CompoundsemiconductorsText/?kɑ?ba?d/碳化物【IV-IVCompounds】/d???r?me?ni?m/鍺【III-VCompounds】

TheIII-Vcompoundsaretypicallyclassifiedbasedon

thegroupVelementformingacompound

intonitrides,phosphides,

arsenidesandantimonides./?na?tra?dz/碳化物/?fɑs?fa?z/磷化物/?ɑ?rs??na?z/砷化物/??nt?m??na?z/銻化物19

Intermsoftheuseinsemiconductor

devicesthemostcommon2Dstructuresarementionedearlierinthischapter

quantumwellscomprisedofultra-thinlayersofsemiconductorwhichistypicallysandwichedbetweentwoothersemiconductorsfeaturingwiderenergy

gap.2

SemiconductorMaterials

2.3InorganicSemiconductors2.3.3

NanoscaleinorganicsemiconductorsText量子阱【Two-dimensional(2D)materials】(a)Single-atomthickgrapheneisrolledupinto(b)single-walledcarbon

nanotube,CNT.202

SemiconductorMaterials

2.3InorganicSemiconductors2.3.3

Nanoscaleinorganicsemiconductors【One-dimensional(1D)materials】

Theone-dimensionalnanostructures

arerepresentedbynanotubes,mostcommonlycarbonnanotubesreferredto

asCNT,andnanowiresinwhichcasesiliconnanowiresreferred

toasSiNWarethebestdeveloped./n?no?tu?bz/納米管/n?n??wa??rz/納米線Schematicrepr