1、Tang shaohua, SCU23:211Silvaco學(xué)習(xí)E-Mail: 上一講知識(shí)回顧和本講內(nèi)容上一講內(nèi)容：器件仿真的整體思路器件結(jié)構(gòu)，材料特性，物理模型，計(jì)算方法，特性獲取和分析這一講安排器件結(jié)構(gòu)生成（2D/3D）ATLAS語(yǔ)法描述結(jié)構(gòu)DevEdit編輯結(jié)構(gòu)23:212Silvaco學(xué)習(xí)器件仿真流程23:21Silvaco學(xué)習(xí)3ATLAS描述器件結(jié)構(gòu)ATLAS描述器件結(jié)構(gòu)的步驟23:21Silvaco學(xué)習(xí)4meshregionelectrodedopingmesh網(wǎng)格定義，狀態(tài)有mesh,x.mesh,y.mesh,eliminate等Mesh對(duì)網(wǎng)格進(jìn)行控制x.mesh和y.mesh

2、定義網(wǎng)格位置及其間隔(line)23:21Silvaco學(xué)習(xí)5mesh space.mult=1.5mesh infile=nmos.strx.mesh loc=0.1 spac=0.05meshEliminate可以在ATLAS生成的mesh基礎(chǔ)上消除掉一些網(wǎng)格線，消除方式為隔一條刪一條參數(shù)columns,rows, ix.low,ix.high,iy.low.ly.high,x.min,x.max,y.min,y.max23:21Silvaco學(xué)習(xí)6Eliminate columns x.min=0.2 x.max=1.4 y.min=0.2 y.max=0.7Eliminate 前Eli

3、minate 后regionRegion將mesh中不同位置以區(qū)域組織起來(lái)語(yǔ)法：Region number= 23:21Silvaco學(xué)習(xí)7region num=1 y.max=0.5 siliconregion num=2 y.min=0.5 y.max=1.0 x.min=0 x.max=1.0 oxideregion num=3 y.min=1.0 y.max=2.0 x.min=0 x.max=1.0 GaAs例句：electrodeElectrode定義電極語(yǔ)法：electrode name= num= substrate 23:21Silvaco學(xué)習(xí)8elec name=emitt

4、er x.min=1.75 x.max=2.0 y.min=-0.05 y.max=0.05elec name=gate x.min=0.25 lenght=0.5elec num=1 name=source y.min=0 left length=0.25elec num=2 name=drain y.min=0 right length=0.25elec name=anode topelec name=cathode bottom例句dopingDoping定義摻雜分布23:21Silvaco學(xué)習(xí)9doping 分布：uniform,gaussian,erfc，具體設(shè)置還可分為三組1，Co

5、ncentration and junction2，Dose and characteristic3，Concentration and characteristic雜質(zhì)類型：n.type,p.type位置：region,x.min,x.max,y.min,y.max,peak,junctionDoping例句23:21Silvaco學(xué)習(xí)10doping uniform conc=1e16 n.type region=1doping region=1 gaussian conc=1e18 peak=0.1 characteristic=0.05 p.type x.left=0.0 x.righ

6、t=1.0doping region=1 gauss conc=1e18 peak=0.2 junct=0.15doping x.min=0.0 x.max=1.0 y.min=0.0 y.max=1.0 n.type ascii infile=concdata均勻摻雜高斯分布從文件導(dǎo)入雜質(zhì)分布ATLAS描述的二極管結(jié)構(gòu)23:21Silvaco學(xué)習(xí)11go atlasmeshx.mesh loc=0.00 spac=0.05x.mesh loc=0.10 spac=0.05y.mesh loc=0.00 spac=0.20y.mesh loc=1.00 spac=0.01y.mesh loc=

7、2.00 spac=0.20region number=1 x.min=0.0 x.max=0.1 y.min=0.0 y.max=1.0 material=siliconregion number=2 x.min=0.0 x.max=0.1 y.min=1.0 y.max=2.0 material=siliconelectrode name=anode topelectrode name=cathode bottomdoping uniform conc=1e18 n.type region=1doping uniform conc=1e18 p.type region=2save outf

8、ile=diode_0.strtonyplot diode_0.strDevEdit編輯器件結(jié)構(gòu)23:21Silvaco學(xué)習(xí)12Work areaDefining regionMesh creationSave the fileDefining region添加、替換或刪除區(qū)域主要參數(shù)：區(qū)域ID(region=)、材料(material=)、區(qū)域坐標(biāo)(points=“0,0 0,1 ”)23:21Silvaco學(xué)習(xí)13Region reg=1 mat=silicon color=0 xffb2 pattern=0 x9 points=“0,0 0.1,0 0.1,1 0,1 0,0”Regio

9、n reg=3 name=anode material=contact elec.id=1 work.func=0 points=“0,0 0.1,0 0.1,1 0,1 0,0”例句Defining impurity定義某區(qū)域的摻雜主要參數(shù)序號(hào)：Id, region.id摻雜：impurity, resistivity,雜質(zhì)分布：peak.value, reference.value, combination.function, concentration.function.y|x|z, x1, x2, y1, y2, rolloff.y, coc.func.y23:21Silvaco學(xué)習(xí)1

10、4impurity23:21Silvaco學(xué)習(xí)15Peak.value為雜質(zhì)濃度reference.value為一定距離后的雜質(zhì)濃度“Gaussian”, “Gaussian (Dist)” , “Error Function”,“Error Function (Dist)” , “Linear (Dist)” , “Logarithmic” log ,“Logarithmic (Dist)” , “Exponential, “Exponential (Dist)” , “Step Function”分布類型有：Rolloff.y|x|z為濃度變化的方向Impurity例子23:21Silva

11、co學(xué)習(xí)16impurity id=1 region.id=1 imp=Donors x1=0 x2=0.1 y1=0 y2=1 peak.value=1e+18 ref.value=1000000000000 comb.func=Multiply rolloff.y=both conc.func.y=Constant rolloff.x=both conc.func.x=Constantimpurity id=2 region.id=4 imp=Composition Fraction X x1=0 x2=0 y1=0 y2=0 peak.value=0.47 comb.func=Multi

12、ply rolloff.y=both conc.func.y=Constant rolloff.x=both conc.func.x=ConstantDefining meshBase.mesh，網(wǎng)格整體控制 參數(shù)有height,width，矩形的最大高度和寬度Bound.conditioning，減少邊界的網(wǎng)格點(diǎn)Constr.mesh，對(duì)網(wǎng)格中三角形做限制主要參數(shù)：X1, x2, y1, y2, max|min.height|ratio|width23:21Silvaco學(xué)習(xí)17Mesh例句23:21Silvaco學(xué)習(xí)18base.mesh height=0.1 width=0.125#bo

13、und.cond max.slope=28 max.ratio=300 rnd.unit=0.001 line.straightening=1 align.points when=automatic#constr.mesh mat.type=semiconductor max.angle=180 max.ratio=200 max.height=1 max.width=1 min.height=0.001 min.width=0.001#constr.mesh x1=0 x2=0.1 y1=0.0 y2=1 max.height=0.08 min.width=0.01constr.mesh x

14、1= 0.01 x2=0.11 y1=1 y2=2 max.height=0.1 min.width=0.01meshDevedit編輯二極管結(jié)構(gòu)的例子23:21Silvaco學(xué)習(xí)19go devedit#region reg=1 mat=silicon color=0 xffb2 pattern=0 x9 points=“0,0 0.1,0 0.1,1 0,1 0,0”impurity id=1 region.id=1 imp=Donors x1=0 x2=0.1 y1=0 y2=1 peak.value=1e+18 ref.value=1000000000000 comb.func=Mul

15、tiply rolloff.y=both conc.func.y=Constant rolloff.x=both conc.func.x=Constantregion reg=2 mat=silicon color=0 xffb2 pattern=0 x9 points=“ 0.01,1 0.11,1 0.11,2 0.01,2 0.01,1” impurity id=1 region.id=2 imp=acceptors x1= 0.01 x2=0.11 y1=1 y2=2 peak.value=1e+18 ref.value=1000000000000 comb.func=Multiply

16、 rolloff.y=both conc.func.y=Constant rolloff.x=both conc.func.x=ConstantDevedit編輯二極管結(jié)構(gòu)的例子23:21Silvaco學(xué)習(xí)20#electroderegion reg=3 name=anode mat=contact elec.id=1 work.func=0 points=“0,0 0.1,0 0.1, 0.01 0, 0.01 0,0”region reg=4 name=cathode mat=contact elec.id=2 work.func=0 points=“ 0.01,2 0.11,2 0.11

17、,2.01 0.01,2.01 0.01,2”# Set Meshing Parametersbase.mesh height=0.1 width=0.125#bound.cond max.slope=28 max.ratio=300 rnd.unit=0.001 line.straightening=1 align.points when=automatic#constr.mesh mat.type=semiconductor max.angle=180 max.ratio=200 max.height=1 max.width=1 min.height=0.001 min.width=0.0

18、01#constr.mesh x1=0 x2=0.1 y1=0.0 y2=1 max.height=0.08 min.width=0.01constr.mesh x1= 0.01 x2=0.11 y1=1 y2=2 max.height=0.1 min.width=0.01meshstructure outf=diode_1.strtonyplot diode_1.str兩種結(jié)構(gòu)生成的方式的對(duì)比ATLAS描述的語(yǔ)法較簡(jiǎn)單，結(jié)構(gòu)也簡(jiǎn)單DevEdit的靈活性要強(qiáng)，相對(duì)復(fù)雜，可對(duì)已有的結(jié)構(gòu)在重新定義網(wǎng)格或是擴(kuò)展成三維結(jié)構(gòu)23:21Silvaco學(xué)習(xí)21Atlas描述的結(jié)構(gòu)Devedit編輯的結(jié)構(gòu)三維結(jié)構(gòu)生成得到三維結(jié)構(gòu)只需在二維結(jié)構(gòu)生成的語(yǔ)法基礎(chǔ)上添加Z軸的坐標(biāo)如z.mesh=., z.min= ,z.max= 23:21Silvaco學(xué)習(xí)22ATLAS描述三維二極管結(jié)構(gòu)23:21Silvaco學(xué)習(xí)23go atlasmesh three.dx.mesh loc=0.00 spac=0.05x.mesh loc=0.1 spac=0.05y.mesh loc=0.00 spac=0.20y.mesh loc=1.00 spac=0.01y.mesh loc=